Shanghai Xinjin Semiconductor Expansion Project (Caohejing Development Zone).
- Invested by Chinese Academy of Sciences (National)-Design by the 9th Design Institute of Nation
- After debugging for more than a year, the fluoride ion still does not meet the discharge standard
- Expansion in 2004, client can only provide land for waste water collection tank
- 5CMH fluorinated wastewater expansion to 20CMH
- 50CMH acid-base wastewater (including ammonia)
- 5CMH is reused to replenish water to the scrubber
- Until 2016, no more expansion works for stricter effluent standard
